Application areas
From the molecular level to industry, every step represents a leap in value.
Semiconductor field
PBI (polybenzimidazole), as a high-performance specialty polymer, boasts exceptional thermal stability, high purity, and superior resistance to strong corrosive environments. It is well-suited to the demanding operating conditions of semiconductor manufacturing, making it the material of choice for high-end equipment and critical components, thereby providing essential support for the industry’s move toward higher value-added applications.
In the core manufacturing process, during the etching stage, ultra‑high‑purity PBI is used for chamber seals, lift pins, and other components, thereby minimizing wafer contamination and improving yield.
In the thin-film deposition process, it is compatible with CVD and PVD technologies, serving as an inner lining and sealing component within the chamber to ensure process stability.
In the lithography process, high-temperature insulating and wafer‑carrying components are used to ensure lithographic precision.
In terms of equipment integration, PBI manufactures wafer chucks, focus rings, and other components to minimize contamination and extend component life; it is also used in seals, insulating gaskets, and similar applications to enhance equipment reliability and reduce maintenance costs.
In manufacturing support, it is tailored to the wafer cleaning and inspection processes, ensuring both cleaning effectiveness and inspection accuracy.
Ultra-high-purity PBI is seeing increasingly broad applications, emerging as an indispensable key material in advanced semiconductor manufacturing and driving industrial upgrading.
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